Semilab - Vizta

Profile & expertise

Semilab designs, produces and sells metrology equipment for the characterization of semiconductor and photovoltaic materials, for monitoring the manufacturing process of semiconductor devices, flat panel displays and solar cells and for R&D purposes in these areas. Originally, our company focused exclusively on products and techniques pertaining to semiconductors characterization, but we have diversified our portfolio in later years. Nevertheless, it can be said that Semilab’s foremost expertise lies within the semiconductor area.

We offer a variety of measurement techniques; most of these involve no contact between the probes and the sample measured, therefore they are non-destructive. Moreover, many of our technologies can be flexibly integrated into various platforms, ranging from simple handheld devices or table-top systems with high resolution mapping capability to fully automated stand-alone production control tools for mid-range and high-level production lines. We also offer in-line measurements for solar cell production lines.

Semilab is based in Budapest, Hungary, and has R&D and product centers in the USA (Tampa, FL, Lehighton, PA and Billerica, MA), in Germany and in Denmark. It has direct sales and service offices in all major markets, including the United States, Japan, Korea, China, Taiwan, Singapore, as well as a network of representatives all over the world.

Role in the Project

Semilab plans to develop a product for the optical inspection of hybrid bonding quality and alignment, which will be initially deployed as a stand-alone system. The technology will also have the potential to be used as an OEM metrology unit for bonding equipment.

This task focuses on the technology optimization of the process steps relative to double stacking for 3D imaging through the development of dedicated metrology. SEMILAB will develop and implement industrial process control plan for wafer bonding and alignment. To control the bonding process, the system – with proper image processing – will be able to perform alignment checks with high precision, and detect mechanical defects such as voids or cracks.

From integration and cost reduction perspectives, a simplified architecture scheme will be also evaluated from process to reliability points of view aiming at 0% Copper density at bonding interface and suppression of one level of the dedicated levels for hybrid bonding. This challenging architecture will be also studied to assess the benefit and/or identify potential further improvements of the SEMILAB metrology technique.

MAIN CONTACT

Miklós Tallián

miklos.tallian@semilab.hu

+36 (0)1 50 54 690

www.semilab.com

Budapest, Hungary

Máté Janecska has been with Semilab’s Optics Group since 2018 and is responsible for the development of metrology equipment as well as optical imaging methods for the characterization of material and manufacturing defects in semiconductor or photovoltaic samples. He obtained the BSc degree as a physicist at University of Pécs in 2015.

Zsolt Kovács has been with Semilab’s Optics Group since 2012 and is responsible for the development of metrology equipment as well as optical imaging methods for the characterization of material and manufacturing defects in semiconductor or photovoltaic samples. From 2009 to 2012, he worked at the Research Institute for Solid State Physics and Optics in Budapest, dealing with optical investigation of flowing phenomena in granular materials. He obtained the MSc degree as a physicist at Eötvös Loránd University in 2012.

György Nádudvari leads the optics development team at Semilab, working on optical inspection and metrology technologies both in semiconductor and photovoltaic industries. In 2007, he joined Semilab, and runs projects including infrared inspection of bulk microdefects in silicon, photoluminescence, and photomodulated reflectance metrology. Earlier, he worked in the area of optical development, inspection, and manufacturing in other companies, including Philips Optical Storage. He holds an MSc degree in engineering physics.